Analytical Investigation of Charging Ability of Insulators under Electron Beam Irradiation inside SEM Chamber

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Muthanna Journal of Pure Sciences – MJPS

Vol.3 – No. 2 / October 2016

Hassan N. Al-Obaidi1, Ali S. Mahdi2

1Deparment of Physics, College of Education, Al-Mustansiriyah University, Baghdad, Iraq.


An analytical procedure has been carried out to measure the charge that may trapped in an insulator sample and related electrostatic surface potential in sense of mirror effect phenomenon. In fact, scanning electron microscope mirror method (SEMME), sometimes called electron mirror method (EME) and/or magnification factor method (MFM), has been used to accomplished that purpose. However, this work has been carried out concerning the theoretical point of view, the mirror plot curve has been adopted as an evaluation scale for the quality of the mirror image. Therefore, this procedure had been used to investigates the experimental mirror plot curves for PMMA material with different accelerating potential and studying the most important parameters that affects in these curves. Results have clearly shows that the radius of irradiated area play an important rule in the shape of mirror plot figure and then the quality of the image.
Keyword: electron optics, scanning electron microscope, mirror effect.

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